In atmospheric conditions at room temperature.

Thermal annealing films were carried out for 1 hour in a vacuum 1g10-5 Pa at temperatures from 100 to 500 s.

Studies of the morphology of the surface of the films were carried out using an atomic-power microscope SMM-2000TA (CJSC PPD Moscow, MIET). In atmospheric conditions at room temperature. Scanning the cantilere on the surface was carried out when maintaining the constant value of the photodiode current by feedback, which corresponds to scanning in mode with the constant interaction of the probe-basement interaction.